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High-Speed Microfabrication Technique Using Focused Laser Beam
YAMAGUCHI, Tetsuro, SEMBA, TakuyaVolume:
73
Year:
2007
Language:
english
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.73.2394
File:
PDF, 1.71 MB
english, 2007