Development of a Linear-Motor-Driven Table with Hydrostatic...

Development of a Linear-Motor-Driven Table with Hydrostatic Water Bearings (Sustaining-Force Estimation of Constant-Flow Hydrostatic Bearing with Rectangular Pad)

OKAHATA, Go, OKUYAMA, Shigeki, YUI, Akinori
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Volume:
79
Year:
2013
Journal:
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C
DOI:
10.1299/kikaic.79.2597
File:
PDF, 1.63 MB
2013
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