High density oxygen plasma ashing of CVD-diamond coating...

High density oxygen plasma ashing of CVD-diamond coating with minimum damage to WC (Co) tool substrates

YUNATA, Ersyzario Edo, AIZAWA, Tatsuhiko, YAMAUCHI, Kazuhisa
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Volume:
3
Year:
2016
Language:
english
Journal:
Mechanical Engineering Journal
DOI:
10.1299/mej.15-00533
File:
PDF, 1.12 MB
english, 2016
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