High density oxygen plasma ashing of CVD-diamond coating with minimum damage to WC (Co) tool substrates
YUNATA, Ersyzario Edo, AIZAWA, Tatsuhiko, YAMAUCHI, KazuhisaVolume:
3
Year:
2016
Language:
english
Journal:
Mechanical Engineering Journal
DOI:
10.1299/mej.15-00533
File:
PDF, 1.12 MB
english, 2016