Investigation of bilayer HfNx gate insulator utilizing ECR...

Investigation of bilayer HfNx gate insulator utilizing ECR plasma sputtering

Atthi, Nithi, Ohmi, Shun-ichiro
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Volume:
13
Year:
2016
Language:
english
Journal:
IEICE Electronics Express
DOI:
10.1587/elex.13.20160054
File:
PDF, 750 KB
english, 2016
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