Stability on SiN Thin Films Prepared by Reactive Sputtering

Stability on SiN Thin Films Prepared by Reactive Sputtering

KATSUDA, Shinichi, KAWANISHI, Yoshitaka
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Volume:
100
Year:
1992
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj.100.134
File:
PDF, 668 KB
1992
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