Thermal Stability of SiNxCy Films Prepared by Plasma CVD

Journal of the Ceramic Society of Japan 1993 Vol. 101; Iss. 1175

Thermal Stability of SiNxCy Films Prepared by Plasma CVD

MORIYAMA, Minoru, ICHINO, Tadasu, HAYASHI, Noriyuki, KAMATA, Kiichiro
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Volume:
101
Year:
1993
Language:
english
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj.101.757
File:
PDF, 3.30 MB
english, 1993
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