Reaction between AlN and Metal Thin Films during High Temperature Annealing
YASUMOTO, Takaaki, YAMAKAWA, Koji, IWASE, Nobuo, SHINOSAWA, NorikoVolume:
101
Year:
1993
Language:
english
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj.101.969
File:
PDF, 1.27 MB
english, 1993