Crystallinity of AlN Film Deposited by Reactive Sputtering...

Crystallinity of AlN Film Deposited by Reactive Sputtering Method

NOMURA, Kenji, ISHIKAWA, Yukari, SHIBATA, Noriyoshi
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Volume:
102
Year:
1994
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj.102.1079
File:
PDF, 1.41 MB
1994
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