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Crystallinity of AlN Film Deposited by Reactive Sputtering Method
NOMURA, Kenji, ISHIKAWA, Yukari, SHIBATA, NoriyoshiVolume:
102
Year:
1994
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj.102.1079
File:
PDF, 1.41 MB
1994