Analysis of the Basic Characteristic by Electrical Model of...

Journal of the Ceramic Society of Japan 2005 Vol. 113; Iss. 1324

Analysis of the Basic Characteristic by Electrical Model of Aluminum Nitride Thin Film Pressure Sensor

OOISHI, Yasunobu, KISHI, Kazushi, AKIYAMA, Morito, NOMA, Hiroaki, TABARU, Tatsuo
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
113
Year:
2005
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj.113.816
File:
PDF, 514 KB
2005
Conversion to is in progress
Conversion to is failed