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Fabrication of SiC-Based Ceramic Microstructures from Preceramic Polymers with Sacrificial Templates and Lithographic Techniques-A Review
YOON, Tae-Ho, LEE, Hong-Joo, YAN, Jia, KIM, Dong-PyoVolume:
114
Year:
2006
Language:
english
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj.114.473
File:
PDF, 806 KB
english, 2006