Preparation of Polysiloxazanes and Their Transformation to...

Journal of the Ceramic Society of Japan 2006 Vol. 114; Iss. 1330

Preparation of Polysiloxazanes and Their Transformation to Silicon Oxynitride

GUNJI, Takahiro, TANIGUCHI, Yoshinori, ABE, Yoshimoto
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Volume:
114
Year:
2006
Language:
english
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj.114.492
File:
PDF, 372 KB
english, 2006
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