Wide-Band and High Temperature Piezoelectric Response of...

Journal of the Ceramic Society of Japan 2006 Vol. 114; Iss. 1332

Wide-Band and High Temperature Piezoelectric Response of Aluminum Nitride Thin Films Prepared on Silicon Substrates

OOISHI, Yasunobu, KISHI, Kazushi, AKIYAMA, Morito, NOMA, Hiroaki, MOROFUJI, Yukari
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
114
Year:
2006
Language:
english
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj.114.722
File:
PDF, 616 KB
english, 2006
Conversion to is in progress
Conversion to is failed