Fabrication of Thick Silicon Nitride by Reaction Bonding and Post-Sintering
KONDO, Naoki, HYUGA, Hideki, KITA, Hideki, KABA, TakahiroVolume:
115
Year:
2007
Language:
english
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj.115.285
File:
PDF, 727 KB
english, 2007