Synthesis of TiO2 Films by Laser CVD

Synthesis of TiO2 Films by Laser CVD

KAMATA, Kiichiro, AMANO, Seiki, FUKASAWA, Hiroyuki, MARUYAMA, Kazunori, TANABE, Isao
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Volume:
97
Year:
1989
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj.97.1534
File:
PDF, 800 KB
1989
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