Bias Effect on the Formation of Carbon Films by RF-Plasma...

Journal of the Ceramic Society of Japan 1990 Vol. 98; Iss. 1138

Bias Effect on the Formation of Carbon Films by RF-Plasma CVD

NAKAYAMA, Masatoshi, UEDA, Kunihiro, SHIBAHARA, Masanori, MARUYAMA, Kazunori, KAMATA, Kiichiro
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Volume:
98
Year:
1990
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj.98.597
File:
PDF, 1.00 MB
1990
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