Nitridation of Silicon Compact in a Gas Mixture of Nitrogen...

Journal of the Ceramic Association Japan 1986 Vol. 94; Iss. 1089

Nitridation of Silicon Compact in a Gas Mixture of Nitrogen and Hydrogen

SEKI, Yachio, KADOTA, Masatane, KONDOH, Isao, UETSUKI, Tsuneo
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Volume:
94
Year:
1986
Journal:
Journal of the Ceramic Association, Japan
DOI:
10.2109/jcersj1950.94.1089_498
File:
PDF, 961 KB
1986
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