Deposition and wear resistance of composite TiBC-SiC...

Journal of the Ceramic Society of Japan 2009 Vol. 117; Iss. 1364

Deposition and wear resistance of composite TiBC-SiC coatings on Si wafer by thermal plasma CVD

SHIMADA, Shiro, FUJI, Yusuke, KIYONO, Hajime, TSUJINO, Jiro, YAMAZAKI, Isao
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
117
Year:
2009
Language:
english
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj2.117.415
File:
PDF, 1.57 MB
english, 2009
Conversion to is in progress
Conversion to is failed