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Determination of oxygen in silicon nitride and aluminium nitride by vacuum heating method using graphite capsule.
SHIGETA, Kitaro, KIKUCHI, Tadashi, FURUYA, KeiichiVolume:
34
Year:
1985
Journal:
Bunseki kagaku
DOI:
10.2116/bunsekikagaku.34.2_87
File:
PDF, 736 KB
1985