Surface analysis for sputtered silicon-carbon-nitrogen...

Surface analysis for sputtered silicon-carbon-nitrogen film.

HINO, Tomoaki, KOMATSU, Satoshi, HIROHATA, Yuko, YAMASHINA, Toshiro
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Volume:
41
Year:
1992
Journal:
Bunseki kagaku
DOI:
10.2116/bunsekikagaku.41.23
File:
PDF, 652 KB
1992
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