![](/img/cover-not-exists.png)
Surface analysis for sputtered silicon-carbon-nitrogen film.
HINO, Tomoaki, KOMATSU, Satoshi, HIROHATA, Yuko, YAMASHINA, ToshiroVolume:
41
Year:
1992
Journal:
Bunseki kagaku
DOI:
10.2116/bunsekikagaku.41.23
File:
PDF, 652 KB
1992