Rapid determination of trace amounts of fluorine in silicon...

Rapid determination of trace amounts of fluorine in silicon nitride by instrumental neutron-activation analysis.

YONEZAWA, Chushiro, KUROSAWA, Tatsuya, MATSUE, Hideaki
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Volume:
47
Year:
1998
Language:
english
Journal:
Bunseki kagaku
DOI:
10.2116/bunsekikagaku.47.829
File:
PDF, 1005 KB
english, 1998
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