Arsenic-implanted polysilicon layers

Arsenic-implanted polysilicon layers

H. Ryssel, H. Iberl, M. Bleier, G. Prinke, K. Haberger, H. Kranz
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Volume:
24
Language:
english
Pages:
4
DOI:
10.1007/bf00899755
Date:
March, 1981
File:
PDF, 322 KB
english, 1981
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