Influence of Substrate Bias Voltage on the Properties of Cu...

MATERIALS TRANSACTIONS 2002 Vol. 43; Iss. 6

Influence of Substrate Bias Voltage on the Properties of Cu Thin Films by Sputter Type Ion Beam Deposition.

Lim, Jae-Won, Ishikawa, Yukio, Miyake, Kiyoshi, Yamashita, Mutsuo, Isshiki, Minoru
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Volume:
43
Year:
2002
Language:
english
Journal:
MATERIALS TRANSACTIONS
DOI:
10.2320/matertrans.43.1403
File:
PDF, 338 KB
english, 2002
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