Effects of Protecting Group of Fluoroalcohol on...

Journal of Photopolymer Science and Technology 2003 Vol. 16; Iss. 5

Effects of Protecting Group of Fluoroalcohol on Lithographic Performance.

Ogata, Toshiyuki, Matsumaru, Shogo, Hirayama, Taku, Shiono, Daiju, Iwai, Takeshi, Hada, Hideo, Shirai, Masamitsu
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Volume:
16
Year:
2003
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.16.707
File:
PDF, 871 KB
2003
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