UV Nanoimprint Lithography and Its Application for Nanodevices
Fukuhara, Makoto, Ono, Hiroshi, Hirasawa, Tamano, Otaguchi, Makoto, Sakai, Nobuji, Mizuno, Jun, Shoji, ShuichiVolume:
20
Year:
2007
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.20.549
File:
PDF, 757 KB
english, 2007