Standing-wave Effect in Photoresist with and without HMDS

Standing-wave Effect in Photoresist with and without HMDS

Yamamoto, Masashi, Horibe, Hideo, Sekiguchi, Atsushi, Kusano, Eiji, Tagawa, Seiichi
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Volume:
21
Year:
2008
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.21.299
File:
PDF, 821 KB
2008
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