Development of Flexible Film Mold for Nanoimprinting Process
Suto, Yasuo, Yamanaka, Misato, Urata, Yoshiho, Yamada, Hiroko, Miyazawa, Yukihiro, Mizawa, TakahideVolume:
29
Year:
2016
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.29.53
File:
PDF, 4.69 MB
english, 2016