Development of Flexible Film Mold for Nanoimprinting...

Development of Flexible Film Mold for Nanoimprinting Process

Suto, Yasuo, Yamanaka, Misato, Urata, Yoshiho, Yamada, Hiroko, Miyazawa, Yukihiro, Mizawa, Takahide
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Volume:
29
Year:
2016
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.29.53
File:
PDF, 4.69 MB
english, 2016
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