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Photosensitive Polyimide Protected by Tetrahydropyranyl Group Based on Chemical Amplification.
Naitoh, Kazuhiko, Ishii, Kazuhisa, Yamaoka, Tsuguo, Omote, ToshihikoVolume:
5
Year:
1992
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.5.339
File:
PDF, 221 KB
english, 1992