Palladium Enhanced Etching of n-type Silicon in...

Electrochemistry 2008 Vol. 76; Iss. 2

Palladium Enhanced Etching of n-type Silicon in Hydrofluoric Acid Solution

YAE, Shinji, ABE, Makoto, FUKUMURO, Naoki, MATSUDA, Hitoshi
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Volume:
76
Year:
2008
Language:
english
Journal:
Electrochemistry
DOI:
10.5796/electrochemistry.76.144
File:
PDF, 857 KB
english, 2008
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