[IEEE 2016 IEEE Compound Semiconductor Integrated Circuit Symposium (CSICS) - Austin, TX, USA (2016.10.23-2016.10.26)] 2016 IEEE Compound Semiconductor Integrated Circuit Symposium (CSICS) - The Impact of AlN Spacer on Forward Gate Current and Stress-Induced Leakage Current (SILC) of GaN HEMT

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