Influence of Laser Plasma Soft X-Ray Irradiation on Crystallization of a-Si Film by Infrared Furnace Annealing
Matsuo, Naoto, Isoda, Nobuya, Heya, Akira, Amano, Sho, Miyamoto, Shuji, Mochizuki, Takayasu, Kawamoto, NaoyaVolume:
51
Year:
2010
Language:
english
Journal:
MATERIALS TRANSACTIONS
DOI:
10.2320/matertrans.m2010154
File:
PDF, 737 KB
english, 2010