Chemical Vapour Deposition Rate of Mo Film in Horizontal...

Chemical Vapour Deposition Rate of Mo Film in Horizontal Tubular Reactor

Yoshikawa, Noboru, Kikuchi, Atsushi
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Volume:
38
Year:
1997
Journal:
Materials Transactions, JIM
DOI:
10.2320/matertrans1989.38.292
File:
PDF, 1.11 MB
1997
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