Nano-Imprint-Molding Resists for Lithography

Nano-Imprint-Molding Resists for Lithography

Schift, Helmut, Park, Sunggook, Gobrecht, Jens
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Volume:
16
Year:
2003
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.16.435
File:
PDF, 1.46 MB
2003
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