Recent Progress of Lithographic Microfabrication by the TPA-Induced Photopolymerization
Yang, Hyun-Kwan, Kim, Moon-Soo, Kang, Seung-Wan, Kim, Kyoung-Soo, Lee, Kwang-Sup, Park, Sang Hu, Yang, Dong-Yoi, Kong, Hong Jin, Sun, Hong-Bo, Kawata, Satoshio, Fleits, PaulVolume:
17
Year:
2004
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.17.385
File:
PDF, 879 KB
2004