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Release Properties and Durability of Release Layer on UV Nanoimprint Lithography
Taniguchi, Jun, Kamiya, Yasuhiro, Ohsaki, Takeshi, Sakai, NobujiVolume:
22
Year:
2009
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.22.175
File:
PDF, 1.11 MB
english, 2009