[IEEE 2016 29th International Vacuum Nanoelectronics Conference (IVNC) - Vancouver, BC, Canada (2016.7.11-2016.7.15)] 2016 29th International Vacuum Nanoelectronics Conference (IVNC) - Improved ionization efficiency in MEMS-type ion-sorption micropump
Grzebyk, Tomasz, Gorecka-Drzazga, Anna, Dziuban, Jan A.Year:
2016
Language:
english
DOI:
10.1109/ivnc.2016.7551461
File:
PDF, 373 KB
english, 2016