[ACS Symposium Series] Polymeric Materials for...

  • Main
  • [ACS Symposium Series] Polymeric...

[ACS Symposium Series] Polymeric Materials for Microelectronic Applications Volume 579 (Science and Technology) || Modeling and Simulation of Chemically Amplified Resist Systems

Ito, Hiroshi, Tagawa, Seiichi, Horie, Kazuyuki
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
10.1021/bk
Year:
1995
Language:
english
DOI:
10.1021/bk-1994-0579.ch014
File:
PDF, 939 KB
english, 1995
Conversion to is in progress
Conversion to is failed