[ACS Symposium Series] Polymeric Materials for Microelectronic Applications Volume 579 (Science and Technology) || Modeling and Simulation of Chemically Amplified Resist Systems
Ito, Hiroshi, Tagawa, Seiichi, Horie, KazuyukiVolume:
10.1021/bk
Year:
1995
Language:
english
DOI:
10.1021/bk-1994-0579.ch014
File:
PDF, 939 KB
english, 1995