Nano-Metals I. Fabrication of Shallow Silicon Nanoholes and...

MATERIALS TRANSACTIONS 2001 Vol. 42; Iss. 8

Nano-Metals I. Fabrication of Shallow Silicon Nanoholes and Fixing Nanoparticles.

Fujii, Hisashi, Kamimoto, Yoshihito, Fukazawa, Yoshiyuki, Okuda, Tetsuya, Yoshioka, Ken
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Volume:
42
Year:
2001
Journal:
MATERIALS TRANSACTIONS
DOI:
10.2320/matertrans.42.1613
File:
PDF, 1.32 MB
2001
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