Layer or Strip Resistance Measurement by Electron Beam...

MATERIALS TRANSACTIONS 2007 Vol. 48; Iss. 5

Layer or Strip Resistance Measurement by Electron Beam Induced Current Technique in a Scanning Electron Microscope

Czerwinski, Andrzej, Pluska, Mariusz, Ratajczak, Jacek, Szerling, Anna, K\\katcki, Jerzy
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Volume:
48
Year:
2007
Language:
english
Journal:
MATERIALS TRANSACTIONS
DOI:
10.2320/matertrans.48.949
File:
PDF, 160 KB
english, 2007
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