Effects of Cu Self-Capping and Ta Capping on Nanometer-Sized Cu Films Sputter-Deposited on β-Ta
Tanimoto, Hisanori, Sugimori, Takayuki, Kumamoto, Shoichiro, Matsui, Hazuki, Mizubayashi, HiroshiVolume:
52
Year:
2011
Language:
english
Journal:
MATERIALS TRANSACTIONS
DOI:
10.2320/matertrans.m2010286
File:
PDF, 266 KB
english, 2011