Control of Oxygen-Atom Transport in Silicon Melt during...

Control of Oxygen-Atom Transport in Silicon Melt during Crystal Growth by Electromagnetic Force

Watanabe, Masahito, Wang, Wei, Eguchi, Minoru, Hibiya, Taketoshi
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Volume:
41
Year:
2000
Journal:
Materials Transactions, JIM
DOI:
10.2320/matertrans1989.41.1013
File:
PDF, 1.20 MB
2000
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