Preparation of Thin Dielectric Films by Plasma-Assisted Chemical Vapor Deposition of Hexamethyldisilazane.
Iriyama, Yu, Nagase, Kazuki, Hasegawa, Yuichi, Ihara, TatsuhikoVolume:
12
Year:
1999
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.12.39
File:
PDF, 387 KB
english, 1999