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Fine pattern imprint lithography using dimpled mold.
Hirai, Yoshihiko, Kanemaki, Yasuhito, Fujiwara, Masaki, Yotsuya, Tutomu, Tanaka, YoshioVolume:
13
Year:
2000
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.13.435
File:
PDF, 390 KB
english, 2000