Simple Monitoring of Discharge State in Inductively Coupled...

Journal of Photopolymer Science and Technology 2002 Vol. 15; Iss. 2

Simple Monitoring of Discharge State in Inductively Coupled Plasma Using Radio Frequency Impedance Analyzer.

Yoshimura, Kikuko, Nakagami, Shinji, Minaguchi, Takeshi, Nakano, Hirohiko, Tatsuta, Toshiaki, Tsuji, Osamu
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Volume:
15
Year:
2002
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.15.283
File:
PDF, 1.01 MB
english, 2002
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