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Behavior and effect of plasma after passing through the slit.
Katoh, Masaaki, Shibata, Masaki, Kojima, Akira, Ohte, TakeoVolume:
15
Year:
2002
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.15.307
File:
PDF, 564 KB
english, 2002