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Chemically Amplified Main Chain Scission: Chopping the Influence of Polymer Dimensions on Line Edge Roughness
Eschbaumer, Christian, Heusinger, Nicole, Kern, Marion, Jutgla, Angela, Hohle, Christoph, Sebald, MichaelVolume:
16
Year:
2003
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.16.13
File:
PDF, 2.10 MB
2003