Chemically Amplified Photosensitive Poly(benzoxazole)
Ebara, Kazuya, Shibasaki, Yuji, Ueda, MitsuruVolume:
16
Year:
2003
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.16.287
File:
PDF, 636 KB
2003