![](/img/cover-not-exists.png)
Profile Simulation of SU-8 Thick Film Resist
Yoshihisa, Sensu, Atsushi, Sekiguchi, Yoshiyuki, Kondo, Satoshi, Mori, Nao, Honda, William D., WeberVolume:
18
Year:
2005
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.18.125
File:
PDF, 761 KB
2005