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Positive Pattern Formation and its Mechanism from Ionic bonded Negative Photosensitive Polyimide
Yoshida, Satoshi, Eguchi, Masuichi, Tamura, Kazutaka, Tomikawa, MasaoVolume:
20
Year:
2007
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.20.145
File:
PDF, 474 KB
english, 2007