Chromophore Effect of Non-ionic Photoacid Generators on...

Journal of Photopolymer Science and Technology 2008 Vol. 21; Iss. 3

Chromophore Effect of Non-ionic Photoacid Generators on Resist Performances

Nishimae, Yuichi, Yamato, Hitoshi, Asakura, Toshikage, Ohwa, Masaki
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Volume:
21
Year:
2008
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.21.377
File:
PDF, 988 KB
english, 2008
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