Impact of Nonconstant Diffusion Coefficient on Latent Image Quality in 22nm Fabrication using Extreme Ultraviolet Lithography
Kozawa, Takahiro, Tagawa, Seiichi, Santillan, Julius Joseph, Itani, ToshiroVolume:
21
Year:
2008
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.21.421
File:
PDF, 536 KB
2008